The SLQ-HC60 flow sensor operates without moving parts and grants high reliability and media compatibility. Flow rates below 100ml/min can be measured for a wide range of media. Also the detection of bubbles in the microliter range is possible. The MEMS-based flowmeter enables precise measurement of dynamic flow rates with a response time of less than 50ms. It requires a supply voltage of 24V and provides a 0-10V analogue output signal.