Energy-saving dry pumps

The dry pumps A 100 L by Pfeiffer Vacuum with their compact dimensions were specially developed for flexible integration in semiconductor production facilities. These dry multi-stage Roots pumps are suited for clean applications such as load-lock chambers and transfer chambers as well as for all other noncorrosive applications.

Despite their compact dimensions these pumps provide high pumping speeds and short pump down times. Today, the A 100 L pumps are installed worldwide in all leading semiconductor fabs. These pumps are suitable for operation in cleanrooms.  

The further development, the A 100 L ES, cuts energy consumption by  up to 50% (ES = Energy Saving). Its pumping speed is significantly higher in the low pressure range. Additional benefits include a lower final pressure and reduced noise level.

The innovative and fully integrated ES module reduces energy use to a minimum in the low pressure range. This significantly reduces operating costs. To illustrate the point: annual savings per pump total up to 7,900kWh. This corresponds to 3.9 tons of CO2.

At a typical 300mm semiconductor fab level equipped with 1,300 load-lock pumps, the energy saving adds up to 10 GWh, or about 360 k € or 5,100 tons of CO2 per year.

In addition to energy savings, the final pressure of the A 100 L ES is reduced to 7x10-4 mbar (hPa). This opens up new potential applications requiring an enhanced pumping capacity combined with low pressure. The noise level is also reduced from 58 to 55 dB (A). The A 100 L ES rounds off the energy-saving product family of medium duty process pumps in the A3P series and the harsh duty process pumps in the A3H series.